BS/JEBG/EBG series electron gun
Electron gun (deflection type) for electron beam evaporation used for the formation of various thin films such as optical films and electrode films.
The electron guns of the BS/JEBG/EBG series from Nippon Electronics Corporation are electron beam evaporation guns (deflection type) used for the formation of various thin films, such as optical thin films and electrode films. 〇Features - By directly irradiating the evaporation material with an electron beam for heating, it achieves high thermal efficiency, allowing for the evaporation of various materials, including high melting point metals, oxides, compounds, and sublimable substances. - Since the evaporation material inside the water-cooled copper crucible is directly heated, there is no reaction with the boat or crucible as seen in resistance heating or induction heating methods. * Haas liners may also be used. - It allows for high-speed output control, enabling precise control of film thickness. * For more details, please download the PDF or feel free to contact us.
- 企業：アズサイエンス 松本本社
- 価格：Other
